Nova Measuring Instruments Ltd. is a leading global semiconductor equipment
manufacturer with solutions and services that are used by 21 of the largest
25 IC manufacturers. Nova's expertise in Thin Film and Optical CD & shape
profiling metrology systems are addressing the complex measurement and process
control challenges of High Volume Production (HVM) in 300 & 200 mm IC manufacturing,
from 90nm to the demanding 45nm and 32nm technology nodes.
The company's systems utilize a combination of Spectroscopic Reflectrometry
and Scatterometry to measure CD, trench depth, photoresist height, thickness
and shape of complex layer stacks, as well as a variety of other features and
parameters guaranteeing the delivery of tight wafer-to-wafer and within-wafer
control. Nova offers Integrated Metrology (IM) and Stand-alone (SA) metrology
product lines addressing different metrology needs. These hardware products
are complemented by advanced structure modeling and application development
software empowering fab engineers with the automation and flexibility necessary
to develop in-fab 2D/3D and in-die applications for high-end semiconductor devices.
Leading Logic Manufacturer Selects Nova Optical CD Solution for 10nm, 7nm Technology Node Production
Major Foundry Acquires Nova’s Metrology Products for 2Xnm Ramp up of Production
Major Foundries Place Orders for Nova’s Metrology Products for 2X nm Production Ramp Up
Nova’s Metrology Solutions Chosen for 11 and 14 nm Technology Node Development
Nova T600 Accurately Controls Processes of Complex Vertical Structures for Beyond 22 nm Nodes
Nova i500 Metrology System Enabling High-Speed Wafer Processing Obtains Multiple Orders
NovaMARS Chosen as One of 15 Best Products of 2009 by Semiconductor International
Ping Wang, Ph.D.
We speak with researchers behind the latest advancement in graphene hBN research that could boost the development of next-generation electronic and quantum devices.
Dr. Laurene Tetard
AZoNano speaks with Dr. Laurene Tetard from the University of Central Florida about her upcoming research into the development of nanotechnology that can detect animal-borne diseases. The hope is that such technology can be used to help rapidly control infected mosquito populations to protect public
Dr. Amir Sheikhi
AZoNano speaks with Dr. Amir Sheikhi from Pennsylvania State University about his research into creating a new group of nanomaterials designed to capture chemotherapy drugs before they impact healthy tissue, amending a fault traditionally associated with conventional nanoparticles.
The Filmetrics R54 advanced sheet resistance mapping tool for semiconductor and compound semiconductor wafers.
This product profile describes the latest nano-particle analyzer "thesis particle size analyzer" and its key
The Filmetrics F40 turns your benchtop microscope into an instrument for measuring thickness and refractive index.