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First Stage Integration of Crocus’ MRAM Technology into TowerJazz’s 130nm CMOS Process

TowerJazz, the global specialty foundry leader, and Crocus Technology, a premier developer of Magnetic Random Access Memory (MRAM), today announced the successful completion of the first stage of integration of Crocus’ Thermally Assisted Switching (TAS)-based MRAM technology into TowerJazz’s 0.13-micron CMOS process.

As a result of the collaboration, a special low temperature back-end process technology was developed that enables TAS MRAM memory arrays to be manufactured in TowerJazz’s core 0.13um copper back-end process flow.

To achieve this milestone, a number of critical technological problems were solved, particularly in the areas of deep submicron lithography of magnetic tunnel junction (MTJ) stacks and the selection of materials for high device reliability. The newly developed technology adds only four masks to conventional CMOS manufacturing flows and is suitable for both standalone and embedded memory applications. The integration into TowerJazz’s copper-based 130nm CMOS logic process sets the stage for the market introduction of leading edge single chip memory products and embedded MRAM IP blocks to be used in complex Systems-On-Chip (SOC) for microcontroller, automotive and communications applications.

“It has been our pleasure to work with the Crocus team, comprised of outstanding experts in magnetic materials and device engineering. Crocus’ experience and robust TAS MRAM technology, combined with TowerJazz’s expertise in technology development and transfer methodology, allowed us to finish the first stage of joint development in record time,” said Zmira Lavie, Vice President, Process Engineering R&D and General Manager, Technology Optimization Process Services Business Unit. “This program required process development and materials integration that were new to conventional CMOS manufacturing. TowerJazz’s flexibility and experience, honed over years as a specialty foundry servicing a number of custom projects, brought rapid success to the MRAM/CMOS integration. We are highly confident that Crocus’ TAS MRAM will reach mass production in a very short period of time.”

“By partnering with TowerJazz, a leader in non-volatile memory solutions, we will be able to quickly scale our industry-changing technology to commercial manufacturing,” said Dr. Bertrand Cambou, Executive Chairman, Crocus Technology. “The close cooperation between the engineering teams was fundamental to achieve working MRAM devices within a short period. The combined teams of Crocus and TowerJazz are moving rapidly to release a manufacturable and high-yielding MRAM technology that will serve both embedded and standalone MRAM applications. We look forward to continuing our successful partnership. TowerJazz’s R&D engineering team has surpassed our expectations in the development of new process modules, contributing immeasurably to the rapid transfer from R&D to mass production.”


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