GV10x DS Asher from Ibss Group

ibss Group, in collaboration with a plasma source inventor, has developed an advanced in situ Asher called GV10x DS. When compared to other standard techniques, the Asher effectively and uniformly reduces carbon and hydrocarbons by up to 10 to 20 times through DS process and can be used across TMP operating pressure ranges without any significant damage to TMP or scanning electron microscope. Standard GV10x DS plasma is driven with oxygen or air to oxidize hydrocarbon impurities and can be utilized in a number of laboratory instruments. Additionally, experiments conducted at synchrotron and NIST laboratories demonstrate that DS hydrogen plasma is safe and effective for eliminating carbon build-up on multilayer mirrors.

Other Equipment