The Microelectronics Research Center (MRC), of the University of Texas at Austin (UT at Austin) has recently increased its facility capabilities by installing a Plasma-Therm VERSALINE® DSE™ system. The addition of leading deep silicon etch technology enables process advances in MRC’s micro, nano and opto-electronics research.
Precise etching and process latitude are key elements to operate successfully in a research center environment. The award-winning deep silicon etch technology that the VERSALINE DSE provides, achieves these objectives through a combination of fast process control features and multi-step process flexibility.
Fast process control features such as patented pressure control algorithms, close mounted rapid gas switching, solid state matching networks and sensitive endpoint detection software, are joined with unmatched silicon-on-insulator (SOI) performance to deliver required high quality etch features.
“We were extremely pleased with Plasma-Therm in terms of their installation of the DSE system and the training they provided. The tool is working as advertised,” stated Dr. Sanjay Banerjee, Director of the MRC at the University of Texas at Austin.
“Understanding our customer’s priorities and what makes them successful is a primary focus at Plasma-Therm. We realize that capital equipment is a significant portion of R&D programs and in turn we work to bring maximum value through high flexibility with all Plasma-Therm systems. Because of this, research and development in material science, optics, MEMS and microelectronics have relied on our equipment for generations,” stated Ed Ostan, executive vice president of sales & marketing at Plasma-Therm.
The University of Texas at Austin Microelectronics Research Center (MRC), funded by the National Science Foundation (NSF) through the National Nanotechnology Infrastructure Network (NNIN), is a state-of-the-art, shared-equipment, open-use facility. The laboratory serves academic, industrial and governmental researchers across the country and around the world. MRC’s lab-members come from a wide variety of disciplines, with research in areas of electronics, optics, MEMS, biology and chemistry, as well as process characterization and fabrication of more traditional electronic devices.
Plasma-Therm, founded in 1974, is a supplier of advanced plasma process equipment that caters to various specialty markets including MEMS, solid state lighting, thin film head, photomask and compound semiconductor. Plasma-Therm offers both dry etch & PECVD technologies. To meet the diverse needs of our global customer base, Plasma-Therm has sales, service and spares locations throughout North America, Europe and Asia-Pacific.