Japanese Sensor Maker Orders New Etch System From Tegal

Tegal Corporation, a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced that it has received an order for a Tegal 915 batch etch system from a leading Japanese sensor and control system maker. The new Tegal 915 system will be used for photoresist strip applications in the customer’s 200mm microswitch fabrication line.

“We are pleased that Noah Corporation, our recently-appointed Japanese representative, has closed this new 900 Series system sale for us in Japan. Noah has been providing excellent technical support to Tegal’s Japanese customers for several months already, and we expect additional sales of both our plasma etch and PVD tools in Japan soon,” said Vahan Tchakerian, Tegal’s Vice President of Global Sales.

The Tegal 915 is one of a series of diode and batch plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching. Over 1,500 systems in the 900 Series have been shipped to date, providing reliable and cost-effective support for a wide range of plasma etch processes. Tegal 915 and 900ACS Series plasma etch tools are optimized for photoresist stripping, solar “coin stack” etching, and pad, zero layer, descum, non-selective nitride, backside, and planarization etching, for HB-LED, MEMS, Power Device, and Optoelectronic device fabrication. The 915 and 900ACS Series platforms can accommodate 75mm to 200mm round, square or rectangular substrates.

Tegal 900 Series customers should also take note that an Advanced Control System (ACS) upgrade is available exclusively from Tegal as a field or factory retrofit for the existing installed base of 900 and 980 series systems. The ACS features a fully integrated graphical user interface, parametric data logging, full factory automation support, and throughput enhancements for the wafer-handling system.


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