Jan 31 2008
Nanometrics Incorporated, a leading supplier of advanced metrology equipment to the semiconductor industry, today introduced NanoCD Suite. This new product suite is composed of four key optical critical dimension (OCD) metrology solutions: NanoGen; NanoMatch; NanoStation and NanoDiffract. When NanoCD Suite is combined with the company’s proven Atlas standalone and 9010 integrated metrology systems, Nanometrics provides a complete OCD solution that can measure and model all 45 nm and smaller devices, including scribe line process control targets and advanced die structures, as well as advanced R&D structures for 32 nm and 22 nm nodes, providing the necessary metrology for critical process control.
The Nanometrics NanoCD Suite is designed to optimize the full capability and connectivity of Nanometrics’ Atlas and 9010 systems for OCD metrology. NanoCD offers industry-proven modeling methods, as well as next-generation real-time regression capability, comprehensive offline sensitivity analysis tools, fast library generation and comprehensive GUI and structure input for true multi-variant modeling. The NanoDiffract software delivers these advanced capabilities in intuitive and easy to deploy hardware form factors, which include: the NanoGen, an offline server-based library generation system; the NanoMatch, a high power computing system incorporated within the Atlas or 9010 metrology system for real-time analysis; and the NanoStation, an offline desktop system used for recipe and library generation.
Beyond traditional scatterometry metrology and film analysis, the NanoCD Suite leverages all the data from all process flows and lets the user input that knowledge into the models for accurate and precise structural metrology. The NanoCD Suite can be used to solve critical CD control problems in lithography and etch, as well as demanding next-generation film thickness, CD, erosion, and microstructure control in CVD, CMP, ALD, and Epi process modules.
“The NanoCD Suite provides robust run-time analysis for film and CD solutions in the most demanding process, engineering and R&D applications,” noted Kevin Heidrich, Nanometrics’ senior director of New Business Development. “Each component of the NanoCD suite is highly complementary to each other. When implemented alongside Nanometrics’ Atlas standalone and 9010 integrated metrology systems, we can offer a complete turnkey OCD solution for fab-wide deployment.”