Oxford Instruments Receives Multiple Orders for Advanced Plasmalab System133 Cluster Tool

Oxford Instruments Plasma Technology (OIPT), a leading manufacturer of high technology tools and systems, has recently received multiple orders with a total value of over £3.5M for its advanced Plasmalab®System133 cluster tool. These systems will be used for the deposition of Diamond Like Carbon (DLC) - a process used in the manufacture of power devices.

DLC coatings have the right electrical resistivity to make high power semiconductors work at ever higher voltages and OIPT was one of the first companies to prove this process in 1995, successfully transferring the process from the laboratory to large scale production. OIPT’s range of production tools offer excellent uniformity, reproducibility and high-throughput processes, offering both single wafer or cassette load wafer handling options with integrated process control, making them ideally suited for this application.

The power semiconductor industry for automotive, industrial electronics, robotics and process automation demands chips which can carry more power, with greater reliability.

Mark Vosloo, Oxford Instruments Plasma Technology’s Sales Director comments, ‘Our many years of expertise in the DLC process based on our System133 cluster tool, ensures that we can meet demanding customer requirements. The company’s proven process capability and reliable tailor made solutions, for these and many other challenging processes and market applications, is the reason we are the manufacturer of choice for these customers.’

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