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Posted in | Nanopositioning Systems

真空ナノ位置決めステージ - PIからP - 915

真空ナノ位置決めステージ - PIからP - 915
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P - 915KLVS高ダイナミクス、真空対応、高負荷nanopositioner XYZピエゾスキャナは200 × 200 mmの非常に大きな開口を提供しています。

特徴＆メリット

  • 10月6日ヘクトパスカルに対応真空
  • 静電容量センサとの直接計測
  • 優れた真直度：<0.1μrad振れ
  • 摩擦、高精度曲げガイドシステム
  • 静電容量センサとの直接計測

Last Update: 3. October 2011 07:57

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