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Posted in | Nanopositioning Systems

진공 Nanopositioning 단계 - PI에서 P - 915

진공 Nanopositioning 단계 - PI에서 P - 915
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P - 915KLVS 높은 역학, 진공 호환, 높은 부하 nanopositioner XYZ 압전 스캐너는 200 X 200mm의 매우 큰 명확 조리개를 제공합니다.

기능 및 장점

  • 10-6 고전력 증폭기와 호환 진공
  • 용량성 센서에 직접 계측
  • 우수한 진직도 : <0.1 ​​μrad Runout
  • 마찰, 고정밀 굴곡을 보호하는 시스템
  • 용량성 센서에 직접 계측

Last Update: 3. October 2011 02:59

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