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Posted in | Nanopositioning Systems

超离频的与线性马达N 664 的准确性纳诺确定的线性阶段从 PI

超离频的与线性马达N 664 的准确性纳诺确定的线性阶段从 PI
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此参考班的线性反馈装置包括有子毫微米解决方法的一个自夹紧的无磁性的马达。 高精确度提供克服的滚柱轴承和一直接评定高精密度，子毫微米解决方法线性编码器。

明显功能

N-664 的关键功能是：

  • 30 mm 的旅行范围。
  • 0.5 毫微米的编码器解决方法。
  • 锁定马达的自。
  • 优越引导的准确性。
  • 速度 10 个 mm/s。
  • 可用真空的版本。

Last Update: 19. April 2012 04:44

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