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Posted in | Nanopositioning Systems

超離頻的與線性馬達N 664 的準確性納諾確定的線性階段從 PI

超離頻的與線性馬達N 664 的準確性納諾確定的線性階段從 PI
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此參考班的線性反饋裝置包括有子毫微米解決方法的一個自夾緊的無磁性的馬達。 高精確度提供克服的滾柱軸承和一直接評定高精密度，子毫微米解決方法線性編碼器。

明顯功能

N-664 的關鍵功能是：

  • 30 mm 的旅行範圍。
  • 0.5 毫微米的編碼器解決方法。
  • 鎖定馬達的自。
  • 優越引導的準確性。
  • 速度 10 个 mm/s。
  • 可用真空的版本。

Last Update: 19. April 2012 04:44

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