The SC3500 evaporation system from Semicore is made of stainless steel and is a water cooled process chamber with swing open front access door. It has a height of 60 inches and a diameter of 40 inches. It includes a cryogenic high vacuum package.
The key features of the SC3500 evaporation system are:
- Integrated deposition rate or process controller with recipe control and data logging
- Includes a IR substrate heater array up to 450°C
- Has a multi-pocket electron beam evaporation source(s) for sequential or co-evaporation
- Includes an ion source for ion beam assisted deposition (IBAD) and substrate pre-cleaning
- Custom or standard substrate fixture that may be a rotating/tilting holder, optical planetary, lift-off dome or any other