Eulitha Introduces 25nm Half-pitch EUV Fabricated Gratings

Eulitha continues to add higher resolution structures to its line of standard products. The newest such item is a 50 nm-pitch grating etched into silicon. These gratings are made with Eulitha’s unique EUV interference lithography technology which means extremely smooth structures and none of the stitching or pixel related imperfections that are found in patterns of similar resolution produced using e-beam lithography.

The replication of these high resolution gratings were demonstrated by the Nanoimprint group at the Paul Scherrer Institute. Gratings with an etch depth of 40nm and a linewidth of 12nm (pitch 50nm) were imprinted in a modified imprint resist (mr-I 7030R) with intrinsic release properties provided by microresist technology GmbH. Well defined trenches were imaged after the thermal imprint process. The residual resist layer was subsequently removed and the replicated structures were etched into the Si substrate (image not shown). The full results will be presented at the NNT conference 20101.

The 25nm half-pitch gratings are available as a standard product or in custom configurations.

1C. Dais, H. H. Solak, M. Altana, C. Spreu, H. Atasoy, J. Gobrecht, H. Schift, Thermal NIL of Large Area 12 nm EUV Interference Lithography Gratings into Resist with Improved Release Properties and Pattern Transfer, Eulitha AG, INKA Institute, Paul Scherrer Institut, micro resist technology GmbH.


Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    Eulitha AG. (2019, February 13). Eulitha Introduces 25nm Half-pitch EUV Fabricated Gratings. AZoNano. Retrieved on June 16, 2024 from

  • MLA

    Eulitha AG. "Eulitha Introduces 25nm Half-pitch EUV Fabricated Gratings". AZoNano. 16 June 2024. <>.

  • Chicago

    Eulitha AG. "Eulitha Introduces 25nm Half-pitch EUV Fabricated Gratings". AZoNano. (accessed June 16, 2024).

  • Harvard

    Eulitha AG. 2019. Eulitha Introduces 25nm Half-pitch EUV Fabricated Gratings. AZoNano, viewed 16 June 2024,

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Your comment type

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.