Nanometrics Install Photoluminescence Mapping System at Philips Electronics Microsystems Plaza

Nanometrics Incorporated, the leading supplier of both advanced integrated and standalone metrology equipment for the semiconductor and related industries, today announced the successful installation of its recently introduced VerteX photoluminescence mapping system at the Philips Electronics Microsystems Plaza (MiPlaza) R&D Facilities located on the High Tech Campus in Eindhoven, Netherlands. The Vertex will be shared by all users of the MiPlaza facility, including the leading-edge optoelectronics foundry company, Cedova.

“We are pleased that Philips selected our new VerteX for the MiPlaza facility,” said Tom Ryan, Nanometrics' product marketing manager for compound semiconductors. “This facility is well known for its 'open innovation' approach to achieving technology breakthroughs. As such, systems selected for installation here must meet incredibly high standards for both technology and quality. We look forward to continuing our ongoing fruitful relationship with Philips as well as growing our association with the staff and users at MiPlaza and Cedova."

MiPlaza is one of the largest shared research service facilities in the world, fostering development of new technologies in the fields of micro-systems and nanotechnologies. In addition to supporting several divisions of Royal Philips Electronics and a diverse mix of other high-tech companies, the facility also is shared by the Dutch Foundation for Fundamental Research on Matter.

“Because the MiPlaza is a shared facility, characterization equipment has to be versatile enough to support a wide range of applications,” said Frank Dirne, Head of MiPlaza’s Thin Film Facilities. “At the same time, it has to satisfy highly demanding specifications for use as a process control tool to support the fabrication of thin film devices. We believe that VerteX can fulfill both roles, as well as provide the predictive capabilities needed to accelerate technology innovation.”

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