RPMBlue-FS PL Mapping Tool from Nanometrics for Compound Semiconductor Users
This video demonstrates the functioning of the RPMBlue-FS photoluminescence (PL) mapping system from Nanometrics. This PL mapping tool can also be fitted with a robotic handler when required. It can handle wafer sizes from 2" to 6" and includes a 300mm focal length monochromator that can cover wavelengths from 200nm to 2.6μ or more.
The RPMBlue-FS is capable of controlling up to 8 MOCVD reactors with a throughput of about 35 wafers per hour on foreign samples and 80 wafers per hour on 2" LED wafers. It can be configured for automated production control, and can also load samples manually for R&D purposes. The RPMBlue-FS tool meets the requirements of nearly all compound semiconductor users.
Run Time – 2:25min
The RPMBlue-FS photoluminescence mapping tool from Nanometrics