Posted in | Nanoanalysis

Demonstration of Fast Scanning of Nanolithography Pattern on Ti Film

Video demonstration by AIST-NT. Local anodic oxidation on Ti film using the vector SPM nanolithography technique. Image size 3x3 µm, line height 3 nm, 400x400 points. The scanning rate is changing from 40 Hz down to 5 Hz.

Fast scanning of nanolithography pattern on Ti film, 3x3 microns

Run time: 1.05 mins

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