Demonstration of Fast Scanning of Nanolithography Pattern on Ti Film
Video demonstration by AIST-NT.
Local anodic oxidation on Ti film using the vector SPM nanolithography technique.
Image size 3x3 µm, line height 3 nm, 400x400 points. The scanning rate
is changing from 40 Hz down to 5 Hz.
Fast scanning of nanolithography pattern on Ti film, 3x3 microns
Run time: 1.05 mins