SMI500 Microscope System for Nanofabrication from SII NanoTechnology
Hakuto exhibited the “SMI500 Microscope System for Nanofabrication”,
a new focused ion beam device from SII Nanotechnology, at the 2009 Micromachine/MEMS
A focused ion beam (FIB) device is a device that scans the surface of a sample
using an ion beam that is narrowly focused to several nanometers, and with this
type of device, microscopic observation on a nano level, etching, and deposition
can be implemented with a single device. Microfabrication using a focused ion
beam (FIB) enables unrestricted fabrication of shapes that combine curves and
lines, and arbitrary shapes can be fabricated by reading bitmap data prepared
by the user.
The main applications include cutting thin slices of samples for use in transition
electron microscopes, changing the wiring of semiconductor devices, evaluating
defects, and observing crystalline grains in metal materials.
Run time: 2.06 mins