The SU8600 is the latest addition to Hitachi’s trusted lineup of electron microscopes, setting a new standard for ultrahigh-resolution cold-field emission SEMs. Designed with both performance and usability in mind, it combines advanced imaging capabilities, greater automation, improved stability, and more efficient workflows—making it a powerful tool for researchers and technicians at any experience level.
Features
UltraHigh-Resolution
Hitachi’s high-brightness cold field emission source allows for ultrahigh-resolution images, even at Ultra-low voltages.
Left: RHO-type Zeolite particle at low-kV. In order to reveal the fine steps structure on the surface, the image was acquired at 0.8 kV of landing voltage. This allows the very fine structure of surface steps to be clearly visible (image on right). Specimen courtesy of Dr. Yoshihiro Kamimura, National Institute of Advanced Industrial Science and Technology (AIST), Japan. Image Credit: Hitachi High-Tech Europe
A Smart Detection System for Low Voltage BSE Imaging
The cross-sectional image of 3D NAND below clearly distinguishes the capacitor's oxide and nitride layers, thanks to the BSE detection capability.
Cross Section of 3D NAND (Acceleration Voltage: 1.5 kV). Image Credit: Hitachi High-Tech Europe
Fast BSE Imaging: New Out-Column Crystal Type BSED (OCD)
Using the new Out-Column Crystal Type BSED (OCD)*, the image was captured in less than one second, yet the lower layer interconnect and FinFET structure of the SRAM remain clearly visible.
Lower Layer Interconnect of 5 nm process SRAM (Acceleration Voltage: 30 kV, Acquisition time <1 second). Image Credit: Hitachi
Enhanced User Experience with Advanced Automation
The “EM Flow Creator” software option lets users set up repeatable SEM operation sequences with ease.
SEM functions can be arranged in the EM Flow Creator window using a simple drag-and-drop method and saved as a reusable recipe. Once a recipe is in place, automated data collection can be carried out under the defined conditions with high accuracy and repeatability.
Image Credit: Hitachi High-Tech Europe
Flexible Interface
A dual monitor configuration provides a flexible and efficient workspace, allowing the user to display and save six signals simultaneously to acquire more information in less time.
1, 2, 4, or 6 signals, including the chamber scope(*) or SEM MAP, can be displayed simultaneously on a single monitor. By adding a second screen, the dual-monitor configuration supports enhanced productivity plus expanded workspace and allows the operation panel to be customized with submenus positioned anywhere on either screen. Image Credit: Hitachi High-Tech Europe
Specifications
Source: Hitachi High-Tech Europe
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Electron
Optics |
Secondary Electron Image resolution |
0.6 nm@15 kV |
| 0.7 nm@1 kV (*1) |
| Magnification |
20 to 2,000,000 x |
| Electron Gun |
Cold cathode field emission gun with anode heating system |
| Accelerating Voltage |
0.5 to 30 kV |
| Landing Voltage (*1) |
0.01 to 20 kV |
Standard
Detectors |
Standard Detectors |
Upper Detector (UD) with ExB filter: SE/BSE signal mixing function |
| Lower Detector (LD) |
| Option Detectors |
Top Detector (TD) |
| In-Column Middle Detector (IMD) |
| Out-Column Crystal Type BSED (OCD) |
| Semiconductor Type BSED (PD-BSED) |
| Cathodoluminescence Detector (CLD) |
| STEM Detector |
| Optional Accessories (*2) |
Energy Dispersive X-ray Spectrometer (EDS) |
| Electron Backscattered Diffraction Detector (EBSD) |
Specimen
Stage |
Stage Control |
5-axis Motor Drive |
| Movable Range |
|
| X |
0 to 110 mm |
| Y |
0 to 110 mm |
| Z |
1.5 to 40 mm |
| T |
-5 to 70 ° |
| R |
360 ° |
Specimen
Chamber |
Specimen Size |
Max. φ150 mm (*3) |
(*1）with deceleration mode
(*2）Mountable Detectors
(*3）please contact for information on larger sizes