Validating Semiconductor Samples Using the FEI Phenom Electron Microscope
Reductions in production yields for semiconductor manufactures can be costly.
Finding the defects to rectify the process and improve yields is a time consuming
and expensive business, where samples must be repeatedly processed by mechanical
or chemical means and then examined each time to see if the defect is in the
examination area. Examinations were carried out using optical microscopes, but
as these defects got smaller and smaller high resolution instruments were required.
Phenom personal electron microscope now offers the optimal alternative,
with rapid sample analysis, small size and reasonable price. Thus validation
of semicondutor samples has become faster and more accurate.
Run time - 2:42min
Semiconductor failure analysis