Physik Instrumente’s A-523 is an air-bearing Z tip/tilt stage with direct drive. It is built as a parallel-kinematic multi-axis system and can be employed for Z and tip/tilt motion. This stage provides ultra-precision in miniature format. Integrating the noncontact elements leads to a frictionless motion platform that offers the best quality, performance, and lifetime.
A-523.25005B3, dimensions in mm. Image Credit: PI (Physik Instrumente) LP
When ordering the A-523 with the A-81× or A-82× series controller, PI performs the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. Users receive a complete and readily usable positioning system.
Features:
- Travel range in Z to ±2.5 mm
- Load capacity to 8 kg
- Rotation range in θX, θY, to ±1°
- Overall height 60 mm
- Platform diameter 250 mm
Accessories and Options
- Built-in vacuum clamping mechanism
- Air filter sets
Application Fields
The Z tip/tilt stage is best suited for high-accuracy applications, such as fiber positioning, wafer inspection, flat screen inspection, optics positioning, maskless lithography, and ultra-LED manufacturing. The non-contact design is best suited for cleanroom applications.
Specifications
Source: PI (Physik Instrumente) LP
| Motion |
A-523.25005B3 |
Tolerance |
| Active axes |
Z θX θY |
|
| Travel range in Z |
5 mm |
|
| Rotation range in θX |
2 ° |
|
| Rotation range in θY |
1.6 ° |
|
| Acceleration in Z, unloaded |
10 m/s² |
max. |
| Maximum velocity in Z, unloaded |
200 mm/s |
|
| Yaw (Rotational crosstalk in θX with motion in Z) |
± 25 µrad |
typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) |
± 25 µrad |
typ. |
| Positioning |
A-523.25005B3 |
Tolerance |
| Bidirectional repeatability in Z |
± 0.25 µm |
typ. |
| Bidirectional repeatability in θX |
± 8 µrad |
typ. |
| Bidirectional repeatability in θY |
± 8 µrad |
typ. |
| Positioning accuracy in Z, calibrated |
± 0.5 µm |
typ. |
| Positioning accuracy in θX, uncalibrated |
± 15 µrad |
typ. |
| Positioning accuracy in θY, uncalibrated |
± 15 µrad |
typ. |
| Minimum incremental motion in Z |
0.01 µm |
typ. |
| Minimum incremental motion in θX |
0.06 µrad |
typ. |
| Minimum incremental motion in θY |
0.06 µrad |
typ. |
| Integrated sensor |
Absolute linear encoder |
|
| Sensor signal |
BiSS-C |
|
| Sensor resolution |
1 nm |
|
| Drive Properties |
A-523.25005B3 |
Tolerance |
| Drive type |
Ironless 3-phase linear motor |
|
| Nominal voltage |
24 V |
|
| Peak voltage |
60 V |
|
| Nominal current, RMS |
1.4 A |
typ. |
| Peak current, RMS |
2.8 A |
typ. |
| Force constant |
5.9 N/A |
|
| Resistance phase-phase |
5.2 Ω |
typ. |
| Inductance phase-phase |
1 mH |
|
| Back EMF phase-phase |
4.2 V·s/m |
max. |
| Pole pitch N-N |
19.66 mm |
|
| Mechanical Properties |
A-523.25005B3 |
Tolerance |
| Guide |
Air bearing guide with air preload |
|
| Permissible push force in Z |
80 N |
max. |
| Overall mass |
8200 g |
|
| Material |
Hardcoat aluminum, stainless steel mounting hardware |
|
| Miscellaneous |
A-523.25005B3 |
Tolerance |
| Connector |
HD D-sub 26 (m) |
|
| Air bearing connection |
Plug connection for hose with 6 mm outer diameter |
|
| Operating pressure |
515 to 585 (75 to 85 psi) kPa |
|
| Air consumption |
84 L/min |
max. |
| Air quality |
Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 |
|
| Recommended controllers / drivers |
A-814 (four axes), A-82x (4 / 6 / 8 axes)
|
|
| Operating temperature range |
+15 to +25 °C |