Reference-class linear stage
Thanks to the smooth-running precision linear guides with crossed roller bearings, the linear stage is particularly suitable for scanning applications with constant velocity. The anti-creep system reliably prevents cage creep. The guides have high load capacity and high precision under all operating conditions.
PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
Direct position measurement
Position measuring takes place directly at the motion platform with the highest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.
The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured values, allows a position resolution of much less than one nanometer. The optical and noncontact PIOne encoders are based on an interferometric measuring principle. Due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
Fields of application
Industry and research. Automation, measuring technology, photonics and precision scanning in semiconductor or flat panel display manufacturing.
The key features of the N-381 are:
- Highest precision with PIOne linear encoder: Minimum incremental motion 0.5 nm
- Travel ranges to 230 mm
- Velocity up to 0.5 m/s
- Absolute encoder with 1 nm resolution
- High guiding accuracy
- Compact design with 160 mm width