M-110: Ultra Compact Micro-Translation Stage

The M-110 ultra-compact micro-translation stage from PI has a resolution of 50 nm.

  • Highly compact as a result of folded drive
  • XY setups could be mounted directly
  • Huge quantities available rapidly
  • Variants ideal for vacuum available
  • Noncontact reference and limit switches
  • Comes with stepper motors and closed-loop DC motors

M-11x.xxx1, dimensions in mm.

M-11x.xxx1, dimensions in mm. Image Credit: PI (Physik Instrumente) LP

 XY setups possible without adapter plate.

XY setups possible without adapter plate. Image Credit: PI (Physik Instrumente) LP

Product Description

Compact Linear Stage, Versatile in use

Linear stage is available with small size due to the folded drive with belt drive. A clear aperture comes with 10 mm Ø. XY setups can be mounted instantly without an adapter plate.

Drive

  • Comes with a 2-phase stepper motor or closed-loop DC gear motor
  • Backlash-compensated threaded spindle or ball screw is provided

Position Measuring

  • Noncontact Hall effect reference and limit switches
  • Variants with DC gear motor: Rotary encoder available on the motor shaft

Application Fields

  • Precision micro-assembly
  • Laser inscription
  • Research
  • Automation
  • Optical alignment

Specifications

5 mm

Table 1. Source: PI (Physik Instrumente) LP

Motion M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Active axes X X X X  
Travel range in X 5 mm 5 mm 5 mm 5 mm  
Maximum velocity in X, unloaded 1 mm/s 1.5 mm/s 1 mm/s 1 mm/s  
Positioning M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Unidirectional repeatability in X 0.25 µm 0.15 µm 0.25 µm 0.15 µm typ.
Bidirectional repeatability in X ± 2 µm ± 2 µm ± 2 µm ± 2 µm typ.
Minimum incremental motion in X 0.05 µm 0.2 µm 0.02 µm 0.2 µm typ.
Backlash in X 3 µm 3 µm 3 µm 3 µm typ.
Reference switch Hall effect Hall effect Hall effect Hall effect  
Limit switches Hall effect Hall effect Hall effect Hall effect  
Motor encoder Incremental rotary encoder Incremental rotary encoder      
Resolution, motor encoder 2048 Cts./rev. 2048 Cts./rev.      
Motor encoder: Sensor signal A/B quadrature, RS-422 A/B quadrature, RS-422      
Drive Properties M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Drive type DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor  
Nominal voltage 12 V 12 V      
Nominal current, RMS 0.16 A 0.16 A 0.25 A 0.25 A typ.
Drive force in negative direction of motion in X 10 N 10 N 10 N 10 N typ.
Drive force in positive direction of motion in X 10 N 10 N 10 N 10 N typ.
Motor resolution     24 Full steps/rev. 24 Full steps/rev.  
Mechanical Properties M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Guide Ball guide Ball guide Ball guide Ball guide  
Drive screw type Fine-threaded spindle Ball screw Fine-threaded spindle Ball screw  
Drive screw pitch 0.4 mm 0.5 mm 0.4 mm 0.5 mm  
Gear ratio i 256 : 9 256 : 9 256 : 9 256 : 9  
Moved mass in X, unloaded 11 g 12 g 11 g 12 g  
Permissible push force in Y 15 N 15 N 15 N 15 N max.
Permissible push force in Z 30 N 30 N 30 N 30 N max.
Permissible torque in θx 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θY 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θZ 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Overall mass 250 g 250 g 250 g 250 g  
Material Anodized aluminum Anodized aluminum Anodized aluminum Anodized aluminum  
Holding force in X, passive     10 N 10 N  
Miscellaneous M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 Tolerance
Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m)  
Recommended controllers / drivers

C-863

C-884

G-901

G-910

ACS modular controller

C-863

C-884

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

 
Cable length 0.5 m 0.5 m 0.5 m 0.5 m  
Operating temperature range -20 to 65 °C -20 to 65 °C -20 to 65 °C -20 to 65 °C  

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

15 mm

Table 2. Source: PI (Physik Instrumente) LP

Motion M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Active axes X X X X  
Travel range in X 15 mm 15 mm 15 mm 15 mm  
Maximum velocity in X, unloaded 1.5 mm/s 2 mm/s 1 mm/s 1 mm/s  
Positioning M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Unidirectional repeatability in X 0.25 µm 0.15 µm 0.25 µm 0.15 µm typ.
Bidirectional repeatability in X ± 2 µm ± 2 µm ± 2 µm ± 2 µm typ.
Minimum incremental motion in X 0.05 µm 0.2 µm 0.02 µm 0.2 µm typ.
Backlash in X 3 µm 3 µm 3 µm 3 µm typ.
Reference switch Hall effect Hall effect Hall effect Hall effect  
Limit switches Hall effect Hall effect Hall effect Hall effect  
Motor encoder Incremental rotary encoder Incremental rotary encoder      
Resolution, motor encoder 2048 Cts./rev. 2048 Cts./rev.      
Motor encoder: Sensor signal A/B quadrature, RS-422 A/B quadrature, RS-422      
Drive Properties M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Drive type DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor  
Nominal voltage 12 V 12 V      
Nominal current, RMS 0.32 A 0.32 A 0.25 A 0.25 A typ.
Drive force in negative direction of motion in X 10 N 10 N 10 N 10 N typ.
Drive force in positive direction of motion in X 10 N 10 N 10 N 10 N typ.
Motor resolution     24 Full steps/rev. 24 Full steps/rev.  
Mechanical Properties M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Guide Ball guide Ball guide Ball guide Ball guide  
Drive screw type Fine-threaded spindle Ball screw Fine-threaded spindle Ball screw  
Drive screw pitch 0.4 mm 0.5 mm 0.4 mm 0.5 mm  
Gear ratio i 256 : 9 256 : 9 256 : 9 256 : 9  
Moved mass in X, unloaded 11 g 12 g 11 g 12 g  
Permissible push force in Y 10 N 10 N 10 N 10 N max.
Permissible push force in Z 30 N 30 N 30 N 30 N max.
Permissible torque in θx 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θY 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θZ 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Overall mass 270 g 270 g 270 g 270 g  
Material Anodized aluminum Anodized aluminum Anodized aluminum Anodized aluminum  
Holding force in X, passive     10 N 10 N  
Miscellaneous M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 Tolerance
Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m)  
Recommended controllers / drivers

C-863

C-884

G-901

G-910

ACS modular controller

C-863

C-884

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

 
Cable length 0.5 m 0.5 m 0.5 m 0.5 m  
Operating temperature range -20 to 65 °C -20 to 65 °C -20 to 65 °C -20 to 65 °C  

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

25 mm

Table 3. Source: PI (Physik Instrumente) LP

Motion M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Active axes X X X X  
Travel range in X 25 mm 25 mm 25 mm 25 mm  
Maximum velocity in X, unloaded 1.5 mm/s 2 mm/s 1 mm/s 1 mm/s  
Positioning M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Unidirectional repeatability in X 0.25 µm 0.15 µm 0.25 µm 0.15 µm typ.
Bidirectional repeatability in X ± 2 µm ± 2 µm ± 2 µm ± 2 µm typ.
Minimum incremental motion in X 0.05 µm 0.2 µm 0.02 µm 0.2 µm typ.
Backlash in X 3 µm 3 µm 3 µm 3 µm typ.
Reference switch Hall effect Hall effect Hall effect Hall effect  
Limit switches Hall effect Hall effect Hall effect Hall effect  
Motor encoder Incremental rotary encoder Incremental rotary encoder      
Resolution, motor encoder 2048 Cts./rev. 2048 Cts./rev.      
Motor encoder: Sensor signal A/B quadrature, RS-422 A/B quadrature, RS-422      
Drive Properties M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Drive type DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor  
Nominal voltage 12 V 12 V      
Nominal current, RMS 0.32 A 0.32 A 0.25 A 0.25 A typ.
Drive force in negative direction of motion in X 10 N 10 N 10 N 10 N typ.
Drive force in positive direction of motion in X 10 N 10 N 10 N 10 N typ.
Motor resolution     24 Full steps/rev. 24 Full steps/rev.  
Mechanical Properties M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Guide Ball guide Ball guide Ball guide Ball guide  
Drive screw type Fine-threaded spindle Ball screw Fine-threaded spindle Ball screw  
Drive screw pitch 0.4 mm 0.5 mm 0.4 mm 0.5 mm  
Gear ratio i 256 : 9 256 : 9 256 : 9 256 : 9  
Moved mass in X, unloaded 11 g 12 g 11 g 12 g  
Permissible push force in Y 10 N 10 N 10 N 10 N max.
Permissible push force in Z 20 N 20 N 20 N 20 N max.
Permissible torque in θx 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θY 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Permissible torque in θZ 0.15 N·m 0.15 N·m 0.15 N·m 0.15 N·m max.
Overall mass 300 g 300 g 300 g 300 g  
Material Anodized aluminum Anodized aluminum Anodized aluminum Anodized aluminum  
Holding force in X, passive     10 N 10 N  
Miscellaneous M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 Tolerance
Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m)  
Recommended controllers / drivers

C-863

C-884

G-901

G-910

ACS modular controller

C-863

C-884

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

C-663

G-901

G-910

ACS modular controller

 
Cable length 0.5 m 0.5 m 0.5 m 0.5 m  
Operating temperature range -20 to 65 °C -20 to 65 °C -20 to 65 °C -20 to 65 °C  

Note on minimum incremental motion: Values are achieved with the recommended controller

Note on nominal current: Values apply per phase

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