The LPS-65 is a low profile linear stage using synchronized piezo stepping motor for high precision and load capacity. The cross roller bearing and big platform are ensuring a smooth and high accurate movement in the range of sub nanometer.
LPS-65 stages can be controlled with our E-861 piezo controller and an optional linear encoder offers nanometer repeatability. Vacuum compatible versions are available.
The key features of the LPS-65 are:
- Piezo driven stepping motor with subnanometer resolution
- Travel range up to 52 mm (2")
- Encoder resolution 0.5 nm
- Integrated linear scale
- Uni-directional repeatability down to 0.005 µm
- Maximum speed 10 mm/sec
- Load capacity up to 2 kg
Video demo: PiezoWalk Linear Motor
The unique PiezoWalk linear motor is non-magnetic and self clamping and provides sub-nanometer resolution. It can be integrated in actuators and linear translation stages as shown in the example above. There is a step mode and a high dynamics analog dither mode within each step.
Linear Translation Stage, Nanopositioning Stage PiezoWalk Linear Motor, Nanometer Precision | PI