LPS-65 is a low profile linear stage using synchronized piezo stepping motor for high precision and load capacity. The cross roller bearing and big platform are ensuring a smooth and high accurate movement in the range of sub nanometer.
LPS-65 stages can be controlled with our E-861 piezo controller and an optional linear encoder offers nanometer repeatability. Vacuum compatible versions are available.
The key features of the
Piezo driven stepping motor with subnanometer resolution
Travel range up to 52 mm (2")
Encoder resolution 0.5 nm
Integrated linear scale
Uni-directional repeatability down to 0.005 µm
Maximum speed 10 mm/sec
Load capacity up to 2 kg
Video demo: PiezoWalk Linear Motor
The unique PiezoWalk linear motor is non-magnetic and self clamping and provides sub-nanometer resolution. It can be integrated in actuators and linear translation stages as shown in the example above. There is a step mode and a high dynamics analog dither mode within each step.