Posted in | Piezo Actuators

Low-Profile High-Speed Stage with Ultrasonic Piezo Linear Drives & Direct Position Measurement

The U-523 micropositioning systems from Physik-Instrumente are low-profile, high-accuracy translation stages with linear encoders. The U-523 stage is next-larger in the series of ultrasonic piezomotor-driven stages of which the U-521 is the smallest. For improved guiding accuracy, the U-523 uses two crossed roller bearings mounted on ground aluminum profiles. The integrated PILine® linear motor can generate closed-loop velocities to 200 mm/s over a 22 mm travel range. An integrated XY stage based on the U-523 is available as the U-723.


Features of the U-523 micropositioning systems include:

  • Travel Range 22 mm
  • Max. Velocity 200 mm/s
  • Ultra-Low Profile
  • Direct Metrology Linear Encoder with 0.01 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Piezo Linear Motor
  • Self Locking at Rest
  • Advantages of PILine® Micropositioning Systems

The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives:

  • Higher Accelerations, up to 5 g
  • Speeds up to 500 mm/s
  • Small Form Factor
  • Self-Locking When Powered Down
  • No Shafts, Gears or Other Rotating Parts
  • Non-Magnetic and Vacuum-Compatible Drive Principle
  • Application Examples

U-523 micropositioning systems are suitable for use is:

  • Biotechnology
  • Micromanipulation
  • Microscopy
  • Quality assurance testing
  • Metrology
  • Mass storage device testing
  • R&D
  • Photonics packaging

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