Low-Profile High-Speed Stage with Ultrasonic Piezo Linear Drives & Direct Position Measurement

The M-664 micropositioning systems from Physik-Instrumente are low-profile, high-accuracy translation stages with linear encoders. The M-664 stage is next-larger in the series of piezomotor-driven stages of which the M-663 is the smallest. For improved guiding accuracy, the M-664 uses two crossed roller bearings mounted on ground aluminum profiles. The integrated P-664 PILine® linear motor can generate forces up to 4 N and maximum closed-loop velocities to 400 mm/s over a 25 mm travel range.


Features of the M-664 micropositioning systems include:

  • Travel Range 25 mm\
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 4 N Drive Force
  • Self Locking at Rest

Advantages of PILine® Micropositioning Systems

The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives:

  • Higher Accelerations, up to 5 g
  • Speeds up to 500 mm/s
  • Small Form Factor
  • Self-Locking When Powered Down
  • No Shafts, Gears or Other Rotating Parts
  • Non-Magnetic and Vacuum-Compatible Drive Principle

Application Examples

M-664 micropositioning systems are suitable for use is:

  • Biotechnology
  • Micromanipulation
  • Microscopy
  • Quality assurance testing
  • Metrology
  • Mass storage device testing
  • R&D
  • Photonics packaging

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