The H-850 parallel kinematics hexapod precision positioning system is used for positioning high loads in six axes of freedom, special requirements have to be met by the positioning system. The H-850KHLC Hexapod aligns elements in vacuum environments with highest precision, the mechanical coupling is adapted to the vacuum chamber‘s characteristics.
Key Features
The key features of the H-850 hexapod precision positioning system are:
- Vacuum compatible to 10-6 hPa
- Six Degrees of Freedom
- Drive: brushless DC motors with gearhead
- Sophisticated controller using vector algorithms
- Load capacity to 1500 kg
- Travel ranges to 340 mm / 60°
- Min. incremental motion < 1 µm