The PI miCos stages can be designed for UHV and cryo applications. To reach a vacuum level of 10-9 mbar the material of the stages have to be selected carefully.
Special end switches for a wide temperature range and special 2 phase stepper motors with stainless steel housing, actively heated up to 120°C for outgasing can be adapted.
This nanopositioning stage provides precision positioning in UHV conditions. The specifications are as follows:
- 200 mm Positioning Range
- ±0.02 microns Reproducibility
- 100 mm/second Velocity
- Payload to 35 kg
- Linear scale encoder (center mounted)