Higher Performance Wafer Metrology and Semiconductor Inspection using Multi-axis Ultra-High Precision Air Bearing Stages and Piezoelectric Fast Focusing Devices

Wafer metrology systems require extremely high geometric precision of all involved motion systems. Air bearing slides, rotary tables and low-profile air bearing Z-axis and tip/tilt stages provide the basis of an extremely accurate multi-axis positioning system. Another advantage of air bearings is their lack of particle generation making them ideal for clean room applications.

Run time: 3:40min

Improving Wafer Inspection & Metrology w/Air Bearings and Piezo Nanopositioning Stages | PI

Video Credit: PI (Physik Instrumente) LP

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