Higher Performance Wafer Metrology and Semiconductor Inspection using Multi-axis Ultra-High Precision Air Bearing Stages and Piezoelectric Fast Focusing Devices
Wafer metrology systems require extremely high geometric precision of all involved motion systems. Air bearing slides, rotary tables and low-profile air bearing Z-axis and tip/tilt stages provide the basis of an extremely accurate multi-axis positioning system. Another advantage of air bearings is their lack of particle generation making them ideal for clean room applications.
Run time: 3:40min
Improving Wafer Inspection & Metrology w/Air Bearings and Piezo Nanopositioning Stages | PI
Video Credit: PI (Physik Instrumente) LP