Semiconductor Wafer Inspection Stage – Multi-Axis High Accuracy Motion Control PI

More and A high accuracy, multi-axis wafer inspection stage, based on linear motors, air bearings, and piezo nanopositioning combining stages and motors providing high-speed motion and dynamic leveling and angular corrections. More on precision automation systems

Run Time - 0:55mins

Wafer Inspection Stage - Multi-Axis Nanopositioning | Air Bearing | Piezo Motor | Linear Motor | PI

Video Credit: PI (Physik Instrumente) LP

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