Parallel-Kinematic Nanopositioning System from PI

This video shows the working principle of the parallel-kinematic nanopositioning system from Physik Instrumente (PI). The nanopositioning system comes with capacitive sensors, reduced inertia, and parallel-metrology arrangement. The arrows in the video indicate the signal flow from the sensor to the closed-loop control. Red: X axis, blue: Y axis.

Run Time - 0:34min

Nanopositioning: Why Parallel-Metrology is Better, by

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