Posted in | Nanoanalysis | Nanotechnology in Semiconductors

Voice Coil Z-Autofocus Motor Improves Performance of Laser Processing, Wafer Surface Metrology

More: https://www.pi-usa.us/en/news-events/news/news-detailpage/vertical-linear-slide-for-fast-nano-focusing/

A high performance voice-coil driven nanopositioning slide for high speed precision laser processing and surface metrology applications in industrial automation. Applications of fast focus motor drives include laser drilling, laser ablation on the micromachining end of the spectrum and nano-precision, surface profiling, semiconductor metrology and wafer inspection.

More on voice coil stages: https://www.pi-usa.us/en/products/voice-coil-stages-voice-coil-actuators/

Each application benefits from higher speed, and higher accuracy control of the focal point, for saving time, increasing throughput and improving quality. The V-308 nanopositioning linear slide is designed for vertical loads up to 1kg, controlled by a voice coil linear motor and a frictionless counterbalance. The design combines high dynamics, nanometer resolution and reliable operation in high duty cycle applications.

Applications: https://www.pi-usa.us/en/tech-blog/how-fast-nano-focusing-and-z-scanning-mechanisms-advance-life-sciences-biotech-laser-processing-and-semiconductors/

Technical details: https://www.pi-usa.us/en/products/microscope-stages-bio-imaging-life-sciences/v-308-voice-coil-pifoc-focus-drive-for-objectives-412418497/

Run time: 1:37min

Voice-Coil Nanopositioning Stage: Vertical Focus Control Motor, Laser Processing, Surface Metrology

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