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Cambridge NanoTech Savannah Series Atomic Layer Deposition System

Cambridge Nanotech is the leading provider of atomic layer deposition (ALD) solutions for research and industry worldwide, delivering comprehensive services and versatile, turnkey systems that are accessible, affordable and accurate to the atomic scale. The Savannah Family exemplifies these core competencies, making it the platform of choice for those doing ALD research and development.

The Savannah comes in three configurations – the S100, S200 and S300. Each one holds substrates of different sizes, up to 300mm for the S300. All come with 2 heated precursors lines, standard, with an option to have up to six precursor lines all capable of handling gas, liquid or solid precursors.

All Savannahs are equipped with special, high-speed, pneumatic pulse valves to enable our unique Exposure Mode™ for deposition on Ultra High Aspect Ratio substrates. Exposure mode has been used to deposit conformal, uniform films on substrates with aspect ratios of greater than 2000:1.

With over 110 Savannah systems shipped worldwide, it is THE choice for ALD researchers worldwide.

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