VERTEQ IPA 2800 Vapor Dryer

Title: VERTEQ IPA 2800 Vapor Dryer
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

VERTEQ IPA 2800

IPA 2800 is a drying system using isopropyl alcohol to provide a clean,dry surface on wafers and substrates System features a class 10 elevator,ultra-pure nitrogen loading environment, short load-to-vapor time and fast recovery between cycles The system is partical netural at 0.2 microns

 

Manufacturer

Verteq

Model

IPA 2800

Wafer Size Range

Maximum

200 mm

Cassettes per Load

2

Controller Type

Microprocessor Controller Type

External Cooling

Water Cooled

Other Information

System will process two cassetts of wafers or devices up to 8" in diameter

System sensors and safety features

  • Automatic and manual operation
  • IPA level sensor
  • IPA Supply low
  • Cooling water flow
  • Cooling water temp.
  • Exhaust air flow loss
  • N2 pressure loss
  • Air pressure loss
  • DI water flow
  • N2 flow loss
  • IPA leak detector
  • Purity limit
  • IPA Fluid temp.
  • Fire alarm (Ultra Violet)
  • Extremely low emissions and alcohol comsumption

System consists of a dryer module and a auxiliary module
Water cooling chiller and vacuum pump not included

Year of Manufacture

1995

Condition

Very Good

Weight

1,305 lb (592 kg)

Close Date: March 18, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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