| Title: |
VERTEQ IPA 2800 Vapor Dryer |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
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| Description: |
 IPA
2800 is a drying system using isopropyl alcohol to provide a clean,dry
surface on wafers and substrates System features a class 10 elevator,ultra-pure
nitrogen loading environment, short load-to-vapor time and fast
recovery between cycles The system is partical netural at 0.2 microns
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Manufacturer |
Verteq |
Model |
IPA 2800 |
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Wafer Size Range |
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Maximum |
200 mm |
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Cassettes per Load |
2 |
Controller Type |
Microprocessor Controller Type |
|
External Cooling |
Water Cooled |
Other Information |
System will process two cassetts of wafers or devices
up to 8" in diameter
System sensors and safety features
- Automatic and manual operation
- IPA level sensor
- IPA Supply low
- Cooling water flow
- Cooling water temp.
- Exhaust air flow loss
- N2 pressure loss
- Air pressure loss
- DI water flow
- N2 flow loss
- IPA leak detector
- Purity limit
- IPA Fluid temp.
- Fire alarm (Ultra Violet)
- Extremely low emissions and alcohol comsumption
System consists of a dryer module and a auxiliary module
Water cooling chiller and vacuum pump not included |
|
Year of Manufacture |
1995 |
Condition |
Very Good |
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Weight |
1,305 lb (592 kg) |
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| Close Date: |
March 18, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |