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Temescal E-Beam Evaporator BJD 1800

Title: Temescal E-Beam Evaporator BJD 1800
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

Temescal

Model

BJD 1800

Description

E Beam Evaporator

Vacuum System

Cryo Pumped

Load Lock Included

No

E Beam Power Supply

Power Supply Type

Solid State

High Voltage Minimum

3 kV

High Voltage Maximum

10 kV

Process Control Voltage Minimum

0 Volts DC

Process Control Voltage Maximum

10 Volts DC

Number of Guns Controlled

1

Lateral/Longitudinal Beam Sweep

Temescal

Electron Source Type

Six Pocket

Crucible Size

10.00 cc (0.61 cu in)

Vacuum System

CTI Onboard 8 cryopump
CTI 8011 Controller
CTI Compressor 1020R

Film Thickness Monitor

Yes

Residual Gas Analyzer

Yes

Accessories

Leybold TSP-TH100 RGA

Other Information

Chamber:

  • 18" Dia., water cooled
  • Dual crystal sensor
  • TP 8-18 Substrate fixtrue
  • Single dome configured for (10)3" Wafers and (7) 2" Wafers
  • Control console:
  • Fanuc system computer
  • Granville Philips 360 Gauge controller
  • Leybold IC/5 Deposition control
  • Programmable sweep control
  • Edwards Hi vac control
  • MC-4C Planetary motor control
  • SIMBA 2 power supply
  • Temescal gun control
  • Condition

    Very Good

    Exterior Dimensions

    Width

    56.000 in (142.2 cm)

    Depth

    34.000 in (86.4 cm)

    Height

    41.000 in (104.1 cm)

    Close Date: March 31, 2015
    Phone: Capovani Brothers Inc. / +1 (518) 346-8347
    Email: cbi@capovani.com
    Click here for further information on this classified