| Title: |
Temescal E-Beam Evaporator BJD 1800 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Temescal |
Model | BJD 1800 |
Description | E Beam Evaporator |
Vacuum System | Cryo Pumped |
Load Lock Included | No |
E Beam Power Supply |
|
Power Supply Type | Solid State |
High Voltage Minimum | 3 kV |
High Voltage Maximum | 10 kV |
Process Control Voltage Minimum | 0 Volts DC |
Process Control Voltage Maximum | 10 Volts DC |
Number of Guns Controlled | 1 |
Lateral/Longitudinal Beam Sweep | Temescal |
Electron Source Type | Six Pocket |
Crucible Size | 10.00 cc (0.61 cu in) |
Vacuum System | CTI Onboard 8 cryopump
CTI 8011 Controller
CTI Compressor 1020R
|
Film Thickness Monitor | Yes |
Residual Gas Analyzer | Yes |
Accessories | Leybold TSP-TH100 RGA |
Other Information | Chamber:
18" Dia., water cooled
Dual crystal sensor
TP 8-18 Substrate fixtrue
Single dome configured for (10)3" Wafers and (7) 2" Wafers
Control console:
Fanuc system computer
Granville Philips 360 Gauge controller
Leybold IC/5 Deposition control
Programmable sweep control
Edwards Hi vac control
MC-4C Planetary motor control
SIMBA 2 power supply
Temescal gun control
|
Condition | Very Good |
Exterior Dimensions |
|
Width | 56.000 in (142.2 cm) |
Depth | 34.000 in (86.4 cm) |
Height | 41.000 in (104.1 cm) |
|
| Close Date: |
March 31, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |