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Karl Suss Manual Mask Aligner MA 150M

Title: Karl Suss Manual Mask Aligner MA 150M
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

Karl Suss

Model

MA 150M

Wafer Size Range

    Minimum

50 mm

    Maximum

150 mm

    Set Size

150 mm

Alignment Optics

Splitfield Video

Software Revision Level

6.0

Air Consumption

0.88  CFM  (0.02 cu m/min)

Accessories

Dual Video Microscope: Model DVM6
Objectives:
Olympus UMPlanFI 5x/0.15
Olympus UMPlanFI 10x/0.03
Olympus LMPlanFI 20x/0.40

Other Information

Alignment/Exposure Modes: Hard, Soft, Vacuum and Proximity

Power Requirements

220 V     10.0 A     60 Hz     1  Phase

Exterior Dimensions

    Width

48.000  in  (121.9 cm)

    Depth

56.000  in  (142.2 cm)

    Height

63.000  in  (160.0 cm)

Weight

1,194  lb  (542 kg)

Close Date: March 31, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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