Applied Materials AMAT Endura CuBS SIP Encore System

Title: Applied Materials AMAT Endura CuBS SIP Encore System
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

ManufacturerApplied Materials
ModelEndura--5500 SiP Encore
Wafer Size Range
  Minimum150 mm
  Maximum200 mm
  Set Size200 mm
Number of Chambers5
Process CapabilitiesHot Al, SIP TTN, SiP Encore Cu & Ta(N), CleanW
Chamber 1 DescriptionEnhanced Hot Aluminum
Standard Body Chamber
Mech. Clamped chuck, Ti clamp ring
CTI Onboard Cryo, fast regen, low vibe
Magnet type: 12.9" Al A,P/N: 0020-26822

Chamber 2 DescriptionTi Nitride
Wide Body Chamber
Elec. Chuck: Bias MCS ESC, SST cover ring
Wafer bias power supply, 13.56MHz 600 W,
CTI Onboard Cryo, fast regen, low vibe
Magnet type: SIP REV2, P/N: 0010-04065

Chamber 3 DescriptionSIP Encore® Cu
Wide Body Chamber
Elec. Chuck: SLT FDR E-Chuck, Ti cover ring, cryo chilled
Wafer bias power supply, 13.56MHz 1250 W,
CTI Onboard Cryo, fast regen, low vibe
Magnet type: LP 8.8, P/N: 0010-12864

Chamber 4 DescriptionSIP Encore® Ta(N)
Wide Body Chamber
Elec.Chuck: SLT FDR E-Chuck, Ti -Arc-Sp
Wafer bias power supply, 13.56MHz 600W, ICE RF Match
CTI Onboard Cryo, fast regen, low vibe
Magnet Type: Encore Rev 2, P/N:0010-14875

Chamber 5 DescriptionCleanW® PVD
Wide Body Chamber
Elec. Chuck: MCS+ ESC, SST-Arc-Sp cover ring
CTI Onboard Cryo, fast regen, low vibe
Magnet type: PVD WII, P/N: 0010-11925

Interface TypeSECS RS-232
Elevator TypeUniversal Manual w/Rotate
External CoolingWater Cooled
Accessories(3) CTI 9600 Compressor, p/n: 3620-01389, water cooled
(3) CTI Onboard Terminal, p/n: 3620-01553
(2) Neslab System III Heat Exchanger
(1) CTL Inc subzero chiller, Model: BCU-L310F1-AMAT
(1) Toyota T100L Dry Pump
(2) Toyata T600 Dry Pump
Other Information

Buffer Chambe

  • Position "A": Pass thru with clear plastic lid
  • Position "B": Cooldown with temp monitor
  • Position "D": Reactive Preclean, Leybold TMP
  • Position "E" Orienter degas with temp feedback
  • Position "F" Orienter degas with temp feedback

Wide Body Loadlocks w/ variable speed soft vent
VHP

Close Date: August 16, 2015
Phone: Capovani Brothers Inc. +1 (518) 346-8347
Email: cbi@capovani.com
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