| Title: |
Applied Materials AMAT Endura CuBS SIP Encore System |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
| Manufacturer | Applied Materials | | Model | Endura--5500 SiP Encore | | Wafer Size Range |  | | | Minimum | 150 mm | | Maximum | 200 mm | | Set Size | 200 mm | | Number of Chambers | 5 | | Process Capabilities | Hot Al, SIP TTN, SiP Encore Cu & Ta(N), CleanW | | Chamber 1 Description | Enhanced Hot Aluminum
Standard Body Chamber
Mech. Clamped chuck, Ti clamp ring
CTI Onboard Cryo, fast regen, low vibe
Magnet type: 12.9" Al A,P/N: 0020-26822 | | Chamber 2 Description | Ti Nitride
Wide Body Chamber
Elec. Chuck: Bias MCS ESC, SST cover ring
Wafer bias power supply, 13.56MHz 600 W,
CTI Onboard Cryo, fast regen, low vibe
Magnet type: SIP REV2, P/N: 0010-04065
| | Chamber 3 Description | SIP Encore® Cu
Wide Body Chamber
Elec. Chuck: SLT FDR E-Chuck, Ti cover ring, cryo chilled
Wafer bias power supply, 13.56MHz 1250 W,
CTI Onboard Cryo, fast regen, low vibe
Magnet type: LP 8.8, P/N: 0010-12864
| | Chamber 4 Description | SIP Encore® Ta(N)
Wide Body Chamber
Elec.Chuck: SLT FDR E-Chuck, Ti -Arc-Sp
Wafer bias power supply, 13.56MHz 600W, ICE RF Match
CTI Onboard Cryo, fast regen, low vibe
Magnet Type: Encore Rev 2, P/N:0010-14875 | | Chamber 5 Description | CleanW® PVD
Wide Body Chamber
Elec. Chuck: MCS+ ESC, SST-Arc-Sp cover ring
CTI Onboard Cryo, fast regen, low vibe
Magnet type: PVD WII, P/N: 0010-11925
| | Interface Type | SECS RS-232 | | Elevator Type | Universal Manual w/Rotate | | External Cooling | Water Cooled | | Accessories | (3) CTI 9600 Compressor, p/n: 3620-01389, water cooled
(3) CTI Onboard Terminal, p/n: 3620-01553
(2) Neslab System III Heat Exchanger
(1) CTL Inc subzero chiller, Model: BCU-L310F1-AMAT
(1) Toyota T100L Dry Pump
(2) Toyata T600 Dry Pump | | Other Information |
Buffer Chambe
- Position "A": Pass thru with clear plastic lid
- Position "B": Cooldown with temp monitor
- Position "D": Reactive Preclean, Leybold TMP
- Position "E" Orienter degas with temp feedback
- Position "F" Orienter degas with temp feedback
Wide Body Loadlocks w/ variable speed soft vent
VHP
|
| Close Date: |
August 16, 2015 |
| Phone: |
Capovani Brothers Inc. +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |
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