| Title: |
March Barrel Plasma Etcher PM-600 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | March Instruments |
Model | PM-
600 |
Etcher Type | Barrel |
Rated Power Output | 300 Watts |
Reactor Center | Cylindrical |
Reactor Center Size |
|
Depth | 12.00 in (30.48 cm) |
Diameter | 10.00 in (25.40 cm) |
Reactor Center
Material | Quartz |
Number of Gas Inputs | Two Gas |
Automatching Network
Included | Yes |
Vacuum Pump Included | Yes |
Vacuum Pump Model | Varian SD-200 |
RF Generator Model | Seren IPS R300 |
Accessories | (1) Quartz Lattice Tray
Door with viewing window
|
Other Information | Automatic and Manual Modes
Operating Frequency: 13.56 MHz
|
Power Requirements | 115 V 60 Hz 1 Phase |
Exterior Dimensions |
|
Width | 23.000 in (58.4 cm) |
Depth | 22.000 in (55.9 cm) |
Height | 17.000 in (43.2 cm) |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |