March Barrel Plasma Etcher PM-600

Title: March Barrel Plasma Etcher PM-600
Company: Capovani Brothers Inc.
Location: Scotia, NY, USA
Email: cbi@capovani.com
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Description:

CINCINNATI SUB-ZERO THERMAL SHOCK CHAMBER -75°C TO 371° C

Manufacturer

March Instruments

Model

PM- 600

Etcher Type

Barrel

Rated Power Output

300 Watts

Reactor Center

Cylindrical

Reactor Center Size

  Depth

12.00 in (30.48 cm)

  Diameter

10.00 in (25.40 cm)

Reactor Center Material

Quartz

Number of Gas Inputs

Two Gas

Automatching Network Included

Yes

Vacuum Pump Included

Yes

Vacuum Pump Model

Varian SD-200

RF Generator Model

Seren IPS R300

Accessories

(1) Quartz Lattice Tray
Door with viewing window

Other Information

Automatic and Manual Modes
Operating Frequency: 13.56 MHz

Power Requirements

115 V 60 Hz 1 Phase

Exterior Dimensions

   Width

23.000 in (58.4 cm)

   Depth

22.000 in (55.9 cm)

   Height

17.000 in (43.2 cm)

Close Date: March 30, 2015
Phone: Capovani Brothers Inc. / +1 (518) 346-8347
Email: cbi@capovani.com
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