真空 Nanopositioning 阶段 - 从 PI 的 P-915

P-915KLVS 高动力,吸尘兼容,高负荷 nanopositioner XYZ 压力扫描程序提供 200 x 200 mm 非常大清楚的开口。

功能 & 好处

  • 真空兼容对 10-6 hPa
  • 与电容传感器的直接计量学
  • 非常好的平直度: <0.1 µrad 溢流
  • 无磨擦,高精密度的弯曲引导的系统
  • 与电容传感器的直接计量学

Last Update: 13. September 2013 09:17

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