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真空 Nanopositioning 階段 - 從 PI 的 P-915

P-915KLVS 高動力,吸塵兼容,高負荷 nanopositioner XYZ 壓力掃描程序提供 200 x 200 mm 非常大清楚的開口。

功能 & 好處

  • 真空兼容對 10-6 hPa
  • 與電容傳感器的直接計量學
  • 非常好的平直度: <0.1 µrad 溢流
  • 無磨擦,高精密度的彎曲引導的系統
  • 與電容傳感器的直接計量學

Last Update: 13. September 2013 09:18

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